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Definition of "chemical beam epitaxy (CBE)" |
a material growth technique that uses metal organic molecules in high vacuum growth chamber and a controlled chemical reaction on a heated substrate to grow a variety of II-VI, III-V, and group IV materials with atomic layer control. Used to create material structures for a variety of electronic and optical devices using quantum wells, heterostructures, and superlattices. This growth technique combined aspects of both MBE and MOCVD growth. |
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