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Definition of "metal-organic chemical vapor deposition (MOCVD or OMCVD)" |
a material growth technique that uses metal organic molecules in an atmospheric or low pressure growth chamber and a controlled chemical reaction on a heated substrate to grow a variety of IIVI, III-V, and group IV materials with atomic layer control. Used to create material structures for a variety of electronic and optical devices using quantum wells, heterostructures and superlattices (for example, TEG, TMG, and TEA). |
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