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Definition of "molecular beam epitaxy (MBE)" |
a material growth technique that uses atomic or molecular beams in an ultra high vacuum chamber to grow a variety of II-VI, III-V, and group IV materials with atomic layer control. Individual molecules or atoms are excited from heated sources (effusion cells) and attach to the substrate in an ordered manner. High quality growth is achieved when the surface diffusion coefficient is sufficiently high that the atoms can arrange themselves coherently on the surface. |
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