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Definition of "photoresist contrast" |
a measure of the resolving power of a photoresist, the photoresist contrast is defined in one of two ways. The measured contrast is the slope of the standard H-D curve as the thickness of resist approaches zero. The theoretical contrast is the maximum slope of a plot of log-development rate versus log-exposure energy (the theoretical H-D curve). The photoresist contrast is usually given the symbol g. |
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