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Definition of "Dill parameters" |
three parameters, named A, B, and C, that are used in the Dill exposure model for photoresists. A and B represent the bleachable and nonbleachable absorption coefficients of the resist, respectively, and C represents the first-order kinetic rate constant of the exposure reaction. (Named for Frederick Dill, the first to publish this model.) Also called the ABC parameters. |
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