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Definition of "lithography" |
(1) for a semiconductor manufacturing process, the process of printing images of the various circuit layers on the wafer via a photographic technique. The technique uses a radiation source, such as light, electrons, or X-rays, to generate a pattern in a radiation-sensitive material. The radiation-sensitive material is illuminated through a mask, that prevents certain portions of the material from being exposed. Exposed material is changed chemically such that it is either removed by or resistant to a solution used to develop the image. |
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