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Definition of "mask set" |
consists of the dozen or so (varies with process and company) individual masks that are required to complete a MMIC wafer fabrication from start to finish. Examples of masks or mask levels are “first level metal” (defines all the primary metal structure on the circuit), “capacitor top plate” (defines the pattern for the metal used to form the top plate of MIM capacitors), and “dielectric etch” (defines areas where dielectric (insulator) material will be removed after coating the entire wafer with it). |
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